Development of an Electro-optical Modulator from Lithium Niobate on Insulator

ABSTRACT The work is written on 71 pages, contains 34 illustrations, 2 tables, 49 sources INTEGRATED OPTICS, LITHIUM NIOBATE, ELECTRO-OPTICAL MODULATOR The work is devoted to the manufacture and measurement of the main characteristics of an integral electro-optical modulator based on thin-film lithium niobate on an insulator. The purpose of the thesis is to develop and manufacture an integrated electro-optical modulator based on thin-film lithium niobate on an insulator and to study the characteristics of the output device. To achieve the goal, the following tasks were set: 1. To analyze various types of integrated optical modulators and make their comparative characteristics. 2. Develop the topology of the EO modulator from LNOI. 3. Create a numerical model that allows you to determine the thickness of the dielectric film, at which the optical losses introduced by the gold contacts will be minimal. 4. To manufacture an integrated optical modulator from thin-film lithium niobium. 5. Measure the basic optical characteristics of the finished integrated electro-optical modulator on LNOI, including Q-factor, resonance depth. 6. Measure the basic electro-optical properties of the manufactured module: the magnitude of the wavelength shift per unit voltage, the depth of modulation and the speed. The integrated electro-optical modulator shown in this work is made of thin-film lithium niobate on an insulator with a Q-factor of about 18,000, has a bandwidth of up to 3.9 GHz and is potentially capable of operating at cryogenic temperatures. The practical significance of the final qualification work consists in the possibility of using the manufactured device in the research activities of scientific groups engaged in quantum optics.