Development of a Silicon Nitride Micro-opto-electromechanical Modulator for Cryogenic Applications

Thesis 69 pages, 38 illustrations, 7 tables, 77 sources. LIST OF KEY WORDS MICRO-OPTO-ELECTROMECHANICAL MODULATOR, PHOTONIC INTEGRATED CIRCUIT, ACTIVE OPTICAL COMPONENT The object of the work is a micro-opto-electromechanical modulators. The purpose of the master's thesis: development of the micro-optoelectromechanical modulator from silicon nitride. The required goal is achieved by developing the photonic integrated circuit topology, process technology, and manufacturing the developed process modification device. The following methods were used to carry out the work: - analytical method, review for literature review after 10 years - method of numerical analysis, calculation to determine the optimal parameters of the slot waveguide - a technological method based on the manufacture of a micro-opto-electromechanical resonator, including electronic lithography, vacuum thermal evaporation, plasma-chemical and liquid etching - experimental method, research for measuring transmission spectra of fabricated structures The development of a technological process for the manufacture of a micro-opto-electromechanical modulator will make it possible to use this technological process for the implementation of both modulators and for the manufacture of microring resonators for applications that require high sensitivity of integrated devices.